WIDELY USED IN SEMICONDUCTOR,CHIP AND ELECTRIC LIGHT SOURCE TECHNOLOGY

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Tungsten hexafluoride(WF6)

Tungsten hexafluoride (wf6) is the only kind of tungsten fluoride that is stable and industrialized. It is mainly used as the raw material of metal tungsten chemical vapor deposition (CVD) process in electronic industry. WSi2 made from it can be used as wiring material in large-scale integrated circuit (LSI). In addition, it can also be used as raw material of semiconductor electrode, fluorinating agent, polymerization catalyst and optical material.
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